JPH0471455B2 - - Google Patents
Info
- Publication number
- JPH0471455B2 JPH0471455B2 JP61291314A JP29131486A JPH0471455B2 JP H0471455 B2 JPH0471455 B2 JP H0471455B2 JP 61291314 A JP61291314 A JP 61291314A JP 29131486 A JP29131486 A JP 29131486A JP H0471455 B2 JPH0471455 B2 JP H0471455B2
- Authority
- JP
- Japan
- Prior art keywords
- sample fluid
- detection cell
- flow rate
- measurement
- particle size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 53
- 239000012530 fluid Substances 0.000 claims description 42
- 238000005259 measurement Methods 0.000 claims description 39
- 238000001514 detection method Methods 0.000 claims description 38
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 22
- 230000035945 sensitivity Effects 0.000 description 11
- 230000000694 effects Effects 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 238000000149 argon plasma sintering Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61291314A JPS63144235A (ja) | 1986-12-05 | 1986-12-05 | 微粒子カウンタ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61291314A JPS63144235A (ja) | 1986-12-05 | 1986-12-05 | 微粒子カウンタ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63144235A JPS63144235A (ja) | 1988-06-16 |
| JPH0471455B2 true JPH0471455B2 (en]) | 1992-11-13 |
Family
ID=17767296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61291314A Granted JPS63144235A (ja) | 1986-12-05 | 1986-12-05 | 微粒子カウンタ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63144235A (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3638807B2 (ja) * | 1999-01-07 | 2005-04-13 | ミドリ安全株式会社 | タバコ煙粒子計測装置 |
| DE10343457C5 (de) | 2003-09-19 | 2012-01-12 | Hydac Filtertechnik Gmbh | Vorrichtung zur Partikelmessung |
| JP5074934B2 (ja) * | 2008-01-11 | 2012-11-14 | 積水化学工業株式会社 | 微粒子濃度計測装置及び微粒子濃度計測方法 |
-
1986
- 1986-12-05 JP JP61291314A patent/JPS63144235A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63144235A (ja) | 1988-06-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313117 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |